CF4 Plasma Treatment on Gd2O3 Nanocrystal Memory for High Performance Nonvolatile Memory Application

Chih-Ting Lin, Jer-Chyi Wang, Chao-Sung Lai, Jui-Lin Hsu, Chi-Fong Ai

Research output: Contribution to conferenceProceeding

Original languageAmerican English
StatePublished - 2010
Event217th Electrochemical Society (ECS) Meeting - Vancouver, BC, Canada
Duration: 25 04 201030 04 2010

Conference

Conference217th Electrochemical Society (ECS) Meeting
Period25/04/1030/04/10

Cite this