Characteristics and Reliability of LTPS TFTs with Fluorinated High-K HfO2 Gate Dielectrics

陳智偉

Research output: Types of ThesisMaster's thesis

Translated title of the contribution氟化二氧化鉿低溫多晶矽薄膜電晶體之特性與可靠度探討
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2008
Externally publishedYes

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