Translated title of the contribution | 氟化二氧化鉿低溫多晶矽薄膜電晶體之特性與可靠度探討 |
---|---|
Original language | American English |
Supervisors/Advisors |
|
State | Published - 2008 |
Externally published | Yes |
Characteristics and Reliability of LTPS TFTs with Fluorinated High-K HfO2 Gate Dielectrics
陳智偉
Research output: Types of Thesis › Master's thesis