Characteristics improvement and carrier transportation of CeO₂ gate dielectrics with rapid thermal annealing

Engineering

• Characteristics 100%
• Rapid Thermal Annealing 100%
• Gate Dielectric 100%
• Properties 50%
• Substrates 50%
• High Temperature 50%
• Annealing 50%
• Mechanisms 50%
• Dielectrics 50%
• Temperature Dependence 50%
• Fowler-Nordheim Tunnelling 50%
• Energy Band Diagram 50%
• Breakdown Voltage 50%
• Cerium 50%

Physics

• Annealing 100%
• Dielectrics 100%
• Transportation 100%
• Substrates 33%
• Injection 33%
• High Temperature 33%
• Diagrams 33%
• Electric Potential 33%
• Temperature Dependence 33%
• Energy Bands 33%
• Dioxide 33%
• Cerium 33%

Material Science

• Annealing 100%
• Dielectric Material 100%
• Cerium Oxide 100%
• Temperature 66%
• Electrical Breakdown 33%