| Translated title of the contribution | 氟對氧化鉿閘極絕緣層的特性探討 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2004 |
| Externally published | Yes |
Characteristics of Fluorine Incorporated HfO2 Gate Dielectrics
吳偉成
Research output: Types of Thesis › Master's thesis