Characteristics of Gd2O3 Gate Dielectric Deposited by Reactive RE-sputtering

許惠欣

Research output: Types of ThesisMaster's thesis

Translated title of the contribution利用射頻濺鍍對氧化釓閘極絕緣層的特性研究
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Pan, Tung-Ming, Supervisor
StatePublished - 2005
Externally publishedYes

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