| Translated title of the contribution | 射頻濺鍍高介電閘極絕緣層在複晶矽薄膜上之特性 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
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| State | Published - 2009 |
| Externally published | Yes |
Characteristics of High-k Gate Dielectrics by RF sputtering deposited on the polycrystalline silicon
邱景祥
Research output: Types of Thesis › Master's thesis