Characteristics of plasma immersion ion implantation treatment on tungsten nanocrystal nonvolatile memory

Chao Sung Lai, Jer Chyi Wang*, Li Chun Chang, Yi Kai Liao, Pai Chi Chou, Wei Cheng Chang, Chi Fong Ai, Wen Fa Tsai

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

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