Characterization of Buried Channel PMOSFET with Germanium Pre-amorphization implant in Source / Drain

李建興

Research output: Types of ThesisMaster's thesis

Translated title of the contribution鍺離子先行非晶化植入源汲端對埋藏通道P型金氧半場效電晶體之特性描述
Original languageAmerican English
Supervisors/Advisors
  • Lin, Jeng-Ping, Supervisor
StatePublished - 2005
Externally publishedYes

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