Characterization of Fluorine-Ion Implant Effects on LTPS TFTs with SiON and Gd2O3 Gate Dielectrics

黃子恩

Research output: Types of ThesisMaster's thesis

Translated title of the contribution氟離子佈植效應對氮氧化矽和氧化釓閘極介電層低溫多晶矽薄膜電晶體
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2008
Externally publishedYes

Cite this