CHARACTERIZATION OF INTRINSIC CAPACITANCES OF SMALL GEOMETRY MOSFET'S.

  • B. J. Sheu*
  • , P. K. Ko
  • , F. C. Hsu
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

8 Scopus citations

Abstract

Summary form only given. A simple and accurate measurement technique for intrinsic gate capacitances has been described. The method can be easily incorporated into an automatic characterization system. Preliminary experimental results suggest that there are some important features in the capacitances of small-geometry MOSFETs which differ significantly from their long-channel counterparts. Further studies on modeling these capacitances are being pursued.

Original languageEnglish
Title of host publicationDigest of Technical Papers - Symposium on VLSI Technology
PublisherBusiness Cent for Academic Soc Japan
Pages80-81
Number of pages2
ISBN (Print)4930813085
StatePublished - 1984
Externally publishedYes

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology

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