Characterization of Soft Breakdown for Sub-4nm Oxides with HF-Vapor Treatments

王仁山

Research output: Types of Thesis › Master's thesis

Original language	American English
Supervisors/Advisors	Lai, Chao-Sung, Supervisor
State	Published - 1998
Externally published	Yes

Access to Document

http://thesis.lib.cgu.edu.tw/thesis/detail/8402520d987b1016dc421d0269166f36/

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