Characterization of the ion-sensitive LAPS and EIS capacitance sensor with Single and Stacked Si3N4 Sensing membranes

  • 李皇佳

Research output: Types of ThesisMaster's thesis

Translated title of the contribution單/雙層氮化矽感測膜於離子感測光定址電位感測器及電解質溶液-絕緣層-半導體型電容感測器之特性研究
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Wu, Min-Hsien, Supervisor
StatePublished - 2009
Externally publishedYes

Cite this