Characterizations of composite TiO2-MgF2 films prepared by reactive ion-assisted coevaporation

Rung Ywan Tsai*, Mu Yi Hua, Chaur Tsang Wei, Fang C. Ho

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

10 Scopus citations

Abstract

Composite TiO2-MgF2 films are fabricated by reactive ion-assisted coevaporation. The optical, structural, mechanical, and chemical properties of these films are systematically studied. From the analysis of x-ray diffraction and spectrophotometer data the crystallographic phase compositions and the optical properties of the composite films are found to be controlled by the relative deposition rate of two evaporation sources. The refractive index and the microhardness of the composite films behave nonlinearly with respect to the composition of the films. When the molar fraction of TiO2 is higher than 40%, the hardness of the composite films exceeds that of pure TiO2 and glass substrate. The surface morphologies of all composite films are featureless and very smooth. It has been shown that composite TiO2-MgF2 films prepared by reactive ion-assisted coevaporation are very suitable for the design and fabrication of single-layer and multilayer antireflection coatings.

Original languageEnglish
Pages (from-to)3411-3418
Number of pages8
JournalOptical Engineering
Volume33
Issue number10
DOIs
StatePublished - 1994
Externally publishedYes

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