| Translated title of the contribution | 超淺接面之碳磷共同擴散 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
|
| State | Published - 2010 |
| Externally published | Yes |
Co-diffusion of carbon and phosphorus in silicon during formation of ultra-shallow junctions
黃孟茹
Research output: Types of Thesis › Master's thesis