| Translated title of the contribution | 超淺接面之碳磷共同擴散 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
|
| State | Published - 2010 |
| Externally published | Yes |
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Co-diffusion of carbon and phosphorus in silicon during formation of ultra-shallow junctions
- 黃孟茹
Research output: Types of Thesis › Master's thesis