Comparison of CeTiO3 and Ce2TiO5 Sensing Films for pH Sensors

Tung Ming Pan*, Tung Yu Wu, Yen Hsiang Huang, Jim Long Her, Bih Show Lou, Sheng Han Tsai, See Tong Pang

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

1 Scopus citations


In this letter, we compared the structural and sensing properties of CeTiO3 and Ce2TiO5 sensing films for electrolyte-insulator-semiconductor (EIS) pH sensors. The structural behavior of these sensing films was characterized by Auger electron spectroscopy, atomic force microscopy, and X-ray photoelectron spectroscopy. In comparison with CeTiO3 sensing film, the EIS sensor using a Ce2TiO5 sensing film exhibited better sensing performance including higher sensitivity (68.35 mV/pH), lower hysteresis voltage (0.9 mV), and smaller drift rate (0.19 mV/h), presumably suggesting this film possessing a high fraction of Ce3+ and a rough surface.

Original languageEnglish
Pages (from-to)885-888
Number of pages4
JournalIEEE Electron Device Letters
Issue number6
StatePublished - 06 2018

Bibliographical note

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  • Ce2TiO5
  • CeTiO3
  • Electrolyte-insulator-semiconductor (EIS)
  • pH sensor


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