Abstract
In this letter, we compared the structural and sensing properties of CeTiO3 and Ce2TiO5 sensing films for electrolyte-insulator-semiconductor (EIS) pH sensors. The structural behavior of these sensing films was characterized by Auger electron spectroscopy, atomic force microscopy, and X-ray photoelectron spectroscopy. In comparison with CeTiO3 sensing film, the EIS sensor using a Ce2TiO5 sensing film exhibited better sensing performance including higher sensitivity (68.35 mV/pH), lower hysteresis voltage (0.9 mV), and smaller drift rate (0.19 mV/h), presumably suggesting this film possessing a high fraction of Ce3+ and a rough surface.
Original language | English |
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Pages (from-to) | 885-888 |
Number of pages | 4 |
Journal | IEEE Electron Device Letters |
Volume | 39 |
Issue number | 6 |
DOIs | |
State | Published - 06 2018 |
Bibliographical note
Publisher Copyright:© 1980-2012 IEEE.
Keywords
- Ce2TiO5
- CeTiO3
- Electrolyte-insulator-semiconductor (EIS)
- pH sensor