Comparison of electrical characteristics of praseodymium oxide gate dielectrics for rf-sputtering and e-beam methods

蔡豐磯

Research output: Types of ThesisMaster's thesis

Translated title of the contribution射頻濺鍍與電子束蒸鍍兩種方法沉積三氧化二鐠之閘介電層電性比較
Original languageAmerican English
Supervisors/Advisors
  • Pan, Tung-Ming, Supervisor
StatePublished - 2006
Externally publishedYes

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