Comparison of NH3 and N2O Plasma Treatments on Bi2O3 Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

Chyuan Haur Kao; Kuan Lin Chen; Yi Shiang Chiu; Lin Sang Hao; Shih Ming Chen; Ming Hsien Li; Ming Ling Lee; Hsiang Chen

doi:10.3390/membranes12020188

Comparison of NH3 and N2O Plasma Treatments on Bi2O3 Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

Chyuan Haur Kao, Kuan Lin Chen, Yi Shiang Chiu, Lin Sang Hao, Shih Ming Chen, Ming Hsien Li, Ming Ling Lee^*, Hsiang Chen^*

^*Corresponding author for this work

Department of Electronic Engineering

Research output: Contribution to journal › Journal Article › peer-review

2 Scopus citations

Abstract

In this study, bismuth trioxide (Bi2O3) membranes in an electrolyte–insulator–semicon-ductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing perfor-mance, the membranes were treated with two types of plasma—NH3 and N2O. To investigate the material property improvements, multiple material characterizations were conducted. Material analysis results indicate that plasma treatments with appropriate time could enhance the crystalli-zation, remove the silicate and facilitate crystallizations. Owing to the material optimizations, the pH sensing capability could be greatly boosted. NH3 or N2O plasma treated-Bi2O3 membranes could reach the pH sensitivity around 60 mV/pH and show promise for future biomedical applications.

Original language	English
Article number	188
Journal	Membranes
Volume	12
Issue number	2
DOIs	https://doi.org/10.3390/membranes12020188
State	Published - 02 2022

Bibliographical note

Publisher Copyright:
© 2022 by the authors. Licensee MDPI, Basel, Switzerland.

Keywords

Bismuth trioxide
Grainization
NH3 and N2O
Nitrogen passivation
Plasma treatment

Access to Document

10.3390/membranes12020188

Cite this

@article{708cc91507d3436ab3cb4fee863feba2,

title = "Comparison of NH3 and N2O Plasma Treatments on Bi2O3 Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure",

abstract = "In this study, bismuth trioxide (Bi2O3) membranes in an electrolyte–insulator–semicon-ductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing perfor-mance, the membranes were treated with two types of plasma—NH3 and N2O. To investigate the material property improvements, multiple material characterizations were conducted. Material analysis results indicate that plasma treatments with appropriate time could enhance the crystalli-zation, remove the silicate and facilitate crystallizations. Owing to the material optimizations, the pH sensing capability could be greatly boosted. NH3 or N2O plasma treated-Bi2O3 membranes could reach the pH sensitivity around 60 mV/pH and show promise for future biomedical applications.",

keywords = "Bismuth trioxide, Grainization, NH3 and N2O, Nitrogen passivation, Plasma treatment",

author = "Kao, {Chyuan Haur} and Chen, {Kuan Lin} and Chiu, {Yi Shiang} and Hao, {Lin Sang} and Chen, {Shih Ming} and Li, {Ming Hsien} and Lee, {Ming Ling} and Hsiang Chen",

note = "Publisher Copyright: {\textcopyright} 2022 by the authors. Licensee MDPI, Basel, Switzerland.",

year = "2022",

month = feb,

doi = "10.3390/membranes12020188",

language = "英语",

volume = "12",

journal = "Membranes",

issn = "2077-0375",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "2",

}

TY - JOUR

T1 - Comparison of NH3 and N2O Plasma Treatments on Bi2O3 Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

AU - Kao, Chyuan Haur

AU - Chen, Kuan Lin

AU - Chiu, Yi Shiang

AU - Hao, Lin Sang

AU - Chen, Shih Ming

AU - Li, Ming Hsien

AU - Lee, Ming Ling

AU - Chen, Hsiang

PY - 2022/2

Y1 - 2022/2

N2 - In this study, bismuth trioxide (Bi2O3) membranes in an electrolyte–insulator–semicon-ductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing perfor-mance, the membranes were treated with two types of plasma—NH3 and N2O. To investigate the material property improvements, multiple material characterizations were conducted. Material analysis results indicate that plasma treatments with appropriate time could enhance the crystalli-zation, remove the silicate and facilitate crystallizations. Owing to the material optimizations, the pH sensing capability could be greatly boosted. NH3 or N2O plasma treated-Bi2O3 membranes could reach the pH sensitivity around 60 mV/pH and show promise for future biomedical applications.

AB - In this study, bismuth trioxide (Bi2O3) membranes in an electrolyte–insulator–semicon-ductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing perfor-mance, the membranes were treated with two types of plasma—NH3 and N2O. To investigate the material property improvements, multiple material characterizations were conducted. Material analysis results indicate that plasma treatments with appropriate time could enhance the crystalli-zation, remove the silicate and facilitate crystallizations. Owing to the material optimizations, the pH sensing capability could be greatly boosted. NH3 or N2O plasma treated-Bi2O3 membranes could reach the pH sensitivity around 60 mV/pH and show promise for future biomedical applications.

KW - Bismuth trioxide

KW - Grainization

KW - NH3 and N2O

KW - Nitrogen passivation

KW - Plasma treatment

UR - http://www.scopus.com/inward/record.url?scp=85124356895&partnerID=8YFLogxK

U2 - 10.3390/membranes12020188

DO - 10.3390/membranes12020188

M3 - 文章

AN - SCOPUS:85124356895

SN - 2077-0375

VL - 12

JO - Membranes

JF - Membranes

IS - 2

M1 - 188

ER -

Comparison of NH3 and N2O Plasma Treatments on Bi2O3 Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

Abstract

Bibliographical note

Keywords

Access to Document

Other files and links

Fingerprint

Cite this