Comparison of ZnO and Ti doped ZnO sensing membrane in bio-sensor applications

Chyuan Haur Kao, Che Wei Chang, Chan Yu Lin, Yen Lin Su, Chun Fu Lin, Chia Lun Chang, Chia Shao Liu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In the paper, the EIS structure with high-k ZnO sensing film has more responsive to H+ relative to Na+ and K+. The Ti doped ZnO sensing membrane annealed with RTA at 700°C shows a higher sensitivity of 57.56 mV/pH, higher linearity, lower hysteresis voltage of 2.79 mV and lower drift rate of 0.29mV/hr than the ZnO samples.

Original languageEnglish
Title of host publication2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509007264
DOIs
StatePublished - 27 09 2016
Event21st IEEE Silicon Nanoelectronics Workshop, SNW 2016 - Honolulu, United States
Duration: 12 06 201613 06 2016

Publication series

Name2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016

Conference

Conference21st IEEE Silicon Nanoelectronics Workshop, SNW 2016
Country/TerritoryUnited States
CityHonolulu
Period12/06/1613/06/16

Bibliographical note

Publisher Copyright:
© 2016 IEEE.

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