Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition

Rung Ywan Tsai*, Sen Chrong Shiau, Fang C. Ho, Mu Yi Hua

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

5 Scopus citations

Abstract

The influences of TiO2 contents on the structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition are systematically investigated. The CaF2 films deposited at an ambient substrate temperature are found to have superior optical, mechanical, and moisture resistant properties with the addition of 10 at. % TiO2. The structure of this film changes from polycrystalline CaF2 to a mixed phase of amorphous TiO2 and polycrystalline CaF2. The hardness of composite films containing 45 at. % TiO2 is even higher than that of pure TiO2 and glass, which is attributed to the isolation of the crystalline CaF2 grains by the interconnection of the amorphous TiO2 dispersoids.

Original languageEnglish
Pages (from-to)2625-2629
Number of pages5
JournalOptical Engineering
Volume37
Issue number9
DOIs
StatePublished - 09 1998
Externally publishedYes

Keywords

  • Reactive ion-assisted codeposition
  • Structural, optical, echanical, and moisture resistant properties

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