Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition

Rung Ywan Tsai; Sen Chrong Shiau; Fang C. Ho; Mu Yi Hua

doi:10.1117/1.601762

Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF₂-TiO₂ composite films prepared by reactive ion-assisted codeposition

Rung Ywan Tsai^*
, Sen Chrong Shiau
, Fang C. Ho
, Mu Yi Hua

^*Corresponding author for this work

Industrial Technology Research Institute of Taiwan
National Tsing Hua University
Materials Research Laboratories
University of Cambridge
National Central University
University of Waterloo
University of Ottawa
National Research Council of Canada

Research output: Contribution to journal › Journal Article › peer-review

5 Scopus citations

Abstract

The influences of TiO₂ contents on the structural, optical, mechanical, and moisture resistant properties of CaF₂-TiO₂ composite films prepared by reactive ion-assisted codeposition are systematically investigated. The CaF₂ films deposited at an ambient substrate temperature are found to have superior optical, mechanical, and moisture resistant properties with the addition of 10 at. % TiO₂. The structure of this film changes from polycrystalline CaF₂ to a mixed phase of amorphous TiO₂ and polycrystalline CaF₂. The hardness of composite films containing 45 at. % TiO₂ is even higher than that of pure TiO₂ and glass, which is attributed to the isolation of the crystalline CaF₂ grains by the interconnection of the amorphous TiO₂ dispersoids.

Original language	English
Pages (from-to)	2625-2629
Number of pages	5
Journal	Optical Engineering
Volume	37
Issue number	9
DOIs	https://doi.org/10.1117/1.601762
State	Published - 09 1998
Externally published	Yes

Keywords

Reactive ion-assisted codeposition
Structural, optical, echanical, and moisture resistant properties

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10.1117/1.601762

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title = "Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition",

abstract = "The influences of TiO2 contents on the structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition are systematically investigated. The CaF2 films deposited at an ambient substrate temperature are found to have superior optical, mechanical, and moisture resistant properties with the addition of 10 at. \% TiO2. The structure of this film changes from polycrystalline CaF2 to a mixed phase of amorphous TiO2 and polycrystalline CaF2. The hardness of composite films containing 45 at. \% TiO2 is even higher than that of pure TiO2 and glass, which is attributed to the isolation of the crystalline CaF2 grains by the interconnection of the amorphous TiO2 dispersoids.",

keywords = "Reactive ion-assisted codeposition, Structural, optical, echanical, and moisture resistant properties",

author = "Tsai, \{Rung Ywan\} and Shiau, \{Sen Chrong\} and Ho, \{Fang C.\} and Hua, \{Mu Yi\}",

year = "1998",

month = sep,

doi = "10.1117/1.601762",

language = "英语",

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pages = "2625--2629",

journal = "Optical Engineering",

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T1 - Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition

AU - Tsai, Rung Ywan

AU - Shiau, Sen Chrong

AU - Ho, Fang C.

AU - Hua, Mu Yi

PY - 1998/9

Y1 - 1998/9

N2 - The influences of TiO2 contents on the structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition are systematically investigated. The CaF2 films deposited at an ambient substrate temperature are found to have superior optical, mechanical, and moisture resistant properties with the addition of 10 at. % TiO2. The structure of this film changes from polycrystalline CaF2 to a mixed phase of amorphous TiO2 and polycrystalline CaF2. The hardness of composite films containing 45 at. % TiO2 is even higher than that of pure TiO2 and glass, which is attributed to the isolation of the crystalline CaF2 grains by the interconnection of the amorphous TiO2 dispersoids.

AB - The influences of TiO2 contents on the structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition are systematically investigated. The CaF2 films deposited at an ambient substrate temperature are found to have superior optical, mechanical, and moisture resistant properties with the addition of 10 at. % TiO2. The structure of this film changes from polycrystalline CaF2 to a mixed phase of amorphous TiO2 and polycrystalline CaF2. The hardness of composite films containing 45 at. % TiO2 is even higher than that of pure TiO2 and glass, which is attributed to the isolation of the crystalline CaF2 grains by the interconnection of the amorphous TiO2 dispersoids.

KW - Reactive ion-assisted codeposition

KW - Structural, optical, echanical, and moisture resistant properties

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U2 - 10.1117/1.601762

DO - 10.1117/1.601762

M3 - 文章

AN - SCOPUS:0009826666

SN - 0091-3286

VL - 37

SP - 2625

EP - 2629

JO - Optical Engineering

JF - Optical Engineering

IS - 9

ER -

Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF₂-TiO₂ composite films prepared by reactive ion-assisted codeposition

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Keywords

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