Deposition and characterization of Ti(C,N,O) coatings by unbalanced megnetron sputtering

J. H. Hsieh; W. Wu; C. Li; C. H. Yu; B. H. Tan

doi:10.1016/S0257-8972(02)00494-2

Deposition and characterization of Ti(C,N,O) coatings by unbalanced megnetron sputtering

J. H. Hsieh^*, W. Wu, C. Li, C. H. Yu, B. H. Tan

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

42 Scopus citations

Abstract

Several TiCNO coatings were deposited using an unbalanced magnetron sputtering system. The coating properties as a function of oxygen/nitrogen flow ratio were studied using glow discharge optical spectrometer, X-ray diffraction, scratch testing and nanoindentation measurement. The tribological properties of the coatings were then investigated using a ball-on-disk setup with alumina balls. The results show that coating properties and performance are greatly affected by the flow rate of oxygen. With oxygen flow rate at 4 sccm during deposition, the TiCNO coating shows the lowest wear rate among all. Further increase in oxygen flow rate caused a decrease of hardness, adhesion and wear resistance, while together with the increase of friction coefficient. Also found is that the color of these coatings changes as a function of oxygen flow rate, indicating that these coatings can be used as decorating thin films with wide variety of choices.

Original language	English
Pages (from-to)	233-237
Number of pages	5
Journal	Surface and Coatings Technology
Volume	163-164
DOIs	https://doi.org/10.1016/S0257-8972(02)00494-2
State	Published - 30 01 2003
Externally published	Yes

Keywords

Hard coating
Magnetron sputtering
Wear
X-ray diffraction

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10.1016/S0257-8972(02)00494-2

Cite this

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title = "Deposition and characterization of Ti(C,N,O) coatings by unbalanced megnetron sputtering",

abstract = "Several TiCNO coatings were deposited using an unbalanced magnetron sputtering system. The coating properties as a function of oxygen/nitrogen flow ratio were studied using glow discharge optical spectrometer, X-ray diffraction, scratch testing and nanoindentation measurement. The tribological properties of the coatings were then investigated using a ball-on-disk setup with alumina balls. The results show that coating properties and performance are greatly affected by the flow rate of oxygen. With oxygen flow rate at 4 sccm during deposition, the TiCNO coating shows the lowest wear rate among all. Further increase in oxygen flow rate caused a decrease of hardness, adhesion and wear resistance, while together with the increase of friction coefficient. Also found is that the color of these coatings changes as a function of oxygen flow rate, indicating that these coatings can be used as decorating thin films with wide variety of choices.",

keywords = "Hard coating, Magnetron sputtering, Wear, X-ray diffraction",

author = "Hsieh, {J. H.} and W. Wu and C. Li and Yu, {C. H.} and Tan, {B. H.}",

year = "2003",

month = jan,

day = "30",

doi = "10.1016/S0257-8972(02)00494-2",

language = "英语",

volume = "163-164",

pages = "233--237",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Deposition and characterization of Ti(C,N,O) coatings by unbalanced megnetron sputtering

AU - Hsieh, J. H.

AU - Wu, W.

AU - Li, C.

AU - Yu, C. H.

AU - Tan, B. H.

PY - 2003/1/30

Y1 - 2003/1/30

N2 - Several TiCNO coatings were deposited using an unbalanced magnetron sputtering system. The coating properties as a function of oxygen/nitrogen flow ratio were studied using glow discharge optical spectrometer, X-ray diffraction, scratch testing and nanoindentation measurement. The tribological properties of the coatings were then investigated using a ball-on-disk setup with alumina balls. The results show that coating properties and performance are greatly affected by the flow rate of oxygen. With oxygen flow rate at 4 sccm during deposition, the TiCNO coating shows the lowest wear rate among all. Further increase in oxygen flow rate caused a decrease of hardness, adhesion and wear resistance, while together with the increase of friction coefficient. Also found is that the color of these coatings changes as a function of oxygen flow rate, indicating that these coatings can be used as decorating thin films with wide variety of choices.

AB - Several TiCNO coatings were deposited using an unbalanced magnetron sputtering system. The coating properties as a function of oxygen/nitrogen flow ratio were studied using glow discharge optical spectrometer, X-ray diffraction, scratch testing and nanoindentation measurement. The tribological properties of the coatings were then investigated using a ball-on-disk setup with alumina balls. The results show that coating properties and performance are greatly affected by the flow rate of oxygen. With oxygen flow rate at 4 sccm during deposition, the TiCNO coating shows the lowest wear rate among all. Further increase in oxygen flow rate caused a decrease of hardness, adhesion and wear resistance, while together with the increase of friction coefficient. Also found is that the color of these coatings changes as a function of oxygen flow rate, indicating that these coatings can be used as decorating thin films with wide variety of choices.

KW - Hard coating

KW - Magnetron sputtering

KW - Wear

KW - X-ray diffraction

UR - http://www.scopus.com/inward/record.url?scp=0037472593&partnerID=8YFLogxK

U2 - 10.1016/S0257-8972(02)00494-2

DO - 10.1016/S0257-8972(02)00494-2

M3 - 文章

AN - SCOPUS:0037472593

SN - 0257-8972

VL - 163-164

SP - 233

EP - 237

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Deposition and characterization of Ti(C,N,O) coatings by unbalanced megnetron sputtering

Abstract

Keywords

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