Deposition of diamond-like carbon film on phase-change optical disk by PECVD

H. Y. Ueng*, C. T. Guo

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

8 Scopus citations

Fingerprint

Dive into the research topics of 'Deposition of diamond-like carbon film on phase-change optical disk by PECVD'. Together they form a unique fingerprint.

Physics

Material Science

Engineering