Abstract
In this study, we investigate the effects of radio frequency of power and gas flow rates on the chemical compositions of atmospheric He plasma. A customized plasma system was setup and equipped with a radio frequency power supply and an optical emission/absorption spectrometer to help characterizing the plasma. For the deposition of thin polymer films, lactic acid is chosen for its chemical stability, biocompatibility and biodegradability. The properties, compositions and microstructures of deposited films are also investigated to assure the success of deposition.
| Original language | English |
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| Title of host publication | Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 1-4 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781538614457 |
| DOIs | |
| State | Published - 22 06 2018 |
| Externally published | Yes |
| Event | 7th International Symposium on Next-Generation Electronics, ISNE 2018 - Taipei, Taiwan Duration: 07 05 2018 → 09 05 2018 |
Publication series
| Name | Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018 |
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Conference
| Conference | 7th International Symposium on Next-Generation Electronics, ISNE 2018 |
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| Country/Territory | Taiwan |
| City | Taipei |
| Period | 07/05/18 → 09/05/18 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.
Keywords
- Atmospheric plasma
- Optical emission/absorption spectra
- Plasma chemistry
- Polymer deposition