Development of High-k NdN Dielectrics and Metal Gate ErN films for CMOS Applications

侯松儒

Research output: Types of ThesisMaster's thesis

Translated title of the contribution研發高介電常數介電層氮化釹及氮化鉺金屬閘極薄膜於互補式金屬氧化物半導體之應用
Original languageAmerican English
Supervisors/Advisors
  • Pan, Tung-Ming, Supervisor
StatePublished - 2007
Externally publishedYes

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