Device and Circuit Simulation Interface for an Integrated VLSI Design Environment

Integration of technology-CAD tools is strongly needed. This paper describes a new program, called MOSGEN, which provides efficient interface between the device simulator PISCES and the circuit simulator SPICE. Algorithms to generate parameters for SPICE built-in MOS transistor models have been developed and incorporated into MOSGEN. Only six PISCES simulation results are required to generate a complete set of SPICE parameters. This interface program, together with SUPREM, PISCES, and SPICE, form an integrated simulation environment for VLSI design. Such an integrated simulation environment greatly facilitate the designers to examine just how a microscopic fabrication variable, such as implantation dose, affects final device and circuit performance and product yield.