Diamond-like carbon coatings on microdrill using an ECR-CVD system

H. Y. Ueng; C. T. Guo

doi:10.1016/j.apsusc.2004.12.031

Diamond-like carbon coatings on microdrill using an ECR-CVD system

H. Y. Ueng^*, C. T. Guo

^*Corresponding author for this work

National Sun Yat-sen University

Research output: Contribution to journal › Journal Article › peer-review

38 Scopus citations

Abstract

The Ti/TiN/TiCN/DLC multilayer coating on the microdrill was processed in a hybrid PVD-ECRCVD coating system (HBS900). Functionally gradient Ti/TiN/TiCN supporting multilayer was pre-deposited initially on the microdrill in order to improve the adhesion strength of the DLC films. The following dry lubricant coating on it is composed of amorphous, diamond-like carbon (DLC) deposited by ECRCVD plasma in the same recipient. For drilling applications, the combination of hard/soft coating layers, TiN/TiCN/DLC, allows it to improve chip flow with a lowered coefficient of friction and reduced cutting force. In view of further cost reduction, technically the Ti/TiN/TiCN/DLC multilayer coating on microdrill could serve this purpose best. Functionally, in adapting a microdrill coated with DLC film, the quality of hole after inspection was found sufficiently superior than that of uncoated ones, and the drilling lifetime obtained a significant improvement reaching about 2.5 times.

Original language	English
Pages (from-to)	246-256
Number of pages	11
Journal	Applied Surface Science
Volume	249
Issue number	1-4
DOIs	https://doi.org/10.1016/j.apsusc.2004.12.031
State	Published - 15 08 2005
Externally published	Yes

Keywords

DLC
ECR
Microdrill
Raman

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10.1016/j.apsusc.2004.12.031

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title = "Diamond-like carbon coatings on microdrill using an ECR-CVD system",

abstract = "The Ti/TiN/TiCN/DLC multilayer coating on the microdrill was processed in a hybrid PVD-ECRCVD coating system (HBS900). Functionally gradient Ti/TiN/TiCN supporting multilayer was pre-deposited initially on the microdrill in order to improve the adhesion strength of the DLC films. The following dry lubricant coating on it is composed of amorphous, diamond-like carbon (DLC) deposited by ECRCVD plasma in the same recipient. For drilling applications, the combination of hard/soft coating layers, TiN/TiCN/DLC, allows it to improve chip flow with a lowered coefficient of friction and reduced cutting force. In view of further cost reduction, technically the Ti/TiN/TiCN/DLC multilayer coating on microdrill could serve this purpose best. Functionally, in adapting a microdrill coated with DLC film, the quality of hole after inspection was found sufficiently superior than that of uncoated ones, and the drilling lifetime obtained a significant improvement reaching about 2.5 times.",

keywords = "DLC, ECR, Microdrill, Raman",

author = "Ueng, {H. Y.} and Guo, {C. T.}",

year = "2005",

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doi = "10.1016/j.apsusc.2004.12.031",

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AU - Ueng, H. Y.

AU - Guo, C. T.

PY - 2005/8/15

Y1 - 2005/8/15

N2 - The Ti/TiN/TiCN/DLC multilayer coating on the microdrill was processed in a hybrid PVD-ECRCVD coating system (HBS900). Functionally gradient Ti/TiN/TiCN supporting multilayer was pre-deposited initially on the microdrill in order to improve the adhesion strength of the DLC films. The following dry lubricant coating on it is composed of amorphous, diamond-like carbon (DLC) deposited by ECRCVD plasma in the same recipient. For drilling applications, the combination of hard/soft coating layers, TiN/TiCN/DLC, allows it to improve chip flow with a lowered coefficient of friction and reduced cutting force. In view of further cost reduction, technically the Ti/TiN/TiCN/DLC multilayer coating on microdrill could serve this purpose best. Functionally, in adapting a microdrill coated with DLC film, the quality of hole after inspection was found sufficiently superior than that of uncoated ones, and the drilling lifetime obtained a significant improvement reaching about 2.5 times.

AB - The Ti/TiN/TiCN/DLC multilayer coating on the microdrill was processed in a hybrid PVD-ECRCVD coating system (HBS900). Functionally gradient Ti/TiN/TiCN supporting multilayer was pre-deposited initially on the microdrill in order to improve the adhesion strength of the DLC films. The following dry lubricant coating on it is composed of amorphous, diamond-like carbon (DLC) deposited by ECRCVD plasma in the same recipient. For drilling applications, the combination of hard/soft coating layers, TiN/TiCN/DLC, allows it to improve chip flow with a lowered coefficient of friction and reduced cutting force. In view of further cost reduction, technically the Ti/TiN/TiCN/DLC multilayer coating on microdrill could serve this purpose best. Functionally, in adapting a microdrill coated with DLC film, the quality of hole after inspection was found sufficiently superior than that of uncoated ones, and the drilling lifetime obtained a significant improvement reaching about 2.5 times.

KW - DLC

KW - ECR

KW - Microdrill

KW - Raman

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M3 - 文章

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EP - 256

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -

Diamond-like carbon coatings on microdrill using an ECR-CVD system

Abstract

Keywords

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