Dielectric and memory characteristics by using WNx interfacial layer on La/Zr doped HfO2 films

沈溢霖

Research output: Types of ThesisMaster's thesis

Translated title of the contribution氮化鎢介面層在鑭/鋯摻雜二氧化鉿薄膜上的介電和記憶體特性
Original languageAmerican English
Supervisors/Advisors
  • Maikap, Siddheswar, Supervisor
StatePublished - 2022
Externally publishedYes

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