Translated title of the contribution | 氮化鎢介面層在鑭/鋯摻雜二氧化鉿薄膜上的介電和記憶體特性 |
---|---|
Original language | American English |
Supervisors/Advisors |
|
State | Published - 2022 |
Externally published | Yes |
Dielectric and memory characteristics by using WNx interfacial layer on La/Zr doped HfO2 films
沈溢霖
Research output: Types of Thesis › Master's thesis