@inproceedings{f36afff3c93d4393aa445512a0cd5c55,
title = "Differential-phase optical coherence reflectometer for surface profile measurement",
abstract = "We developed a novel differential-phase optical coherence reflectometer (DP-OCR) by using a low-coherence light source and integrated with differential phase detection technique on surface profile measurement. In this setup, 2{\AA} on detection of axial displacement was demonstrated. Thus, a localized surface profile was measured precisely by scanning an optical grating surface in this measurement. Moreover, the requirement on equal amplitude of the reference and signal beams of this novel refiectometer is discussed.",
keywords = "Differential-phase, Low coherence, Optical coherence refiectometer, Optical heterodyne, Profilometer",
author = "Huang, {Huan Jang} and Kuo, {Wen Chuan} and Chang, {Sheng Yi} and Ho, {Chien Wa} and Chien Chou",
year = "2007",
language = "英语",
isbn = "0819467715",
series = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",
booktitle = "Optical Coherence Tomography and Coherence Techniques III",
note = "Optical Coherence Tomography and Coherence Techniques III ; Conference date: 17-06-2007 Through 19-06-2007",
}