Differential-phase optical coherence reflectometer for surface profile measurement

Huan Jang Huang, Wen Chuan Kuo, Sheng Yi Chang, Chien Wa Ho, Chien Chou*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We developed a novel differential-phase optical coherence reflectometer (DP-OCR) by using a low-coherence light source and integrated with differential phase detection technique on surface profile measurement. In this setup, 2Å on detection of axial displacement was demonstrated. Thus, a localized surface profile was measured precisely by scanning an optical grating surface in this measurement. Moreover, the requirement on equal amplitude of the reference and signal beams of this novel refiectometer is discussed.

Original languageEnglish
Title of host publicationOptical Coherence Tomography and Coherence Techniques III
StatePublished - 2007
Externally publishedYes
EventOptical Coherence Tomography and Coherence Techniques III - Munich, Germany
Duration: 17 06 200719 06 2007

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume6627
ISSN (Print)1605-7422

Conference

ConferenceOptical Coherence Tomography and Coherence Techniques III
Country/TerritoryGermany
CityMunich
Period17/06/0719/06/07

Keywords

  • Differential-phase
  • Low coherence
  • Optical coherence refiectometer
  • Optical heterodyne
  • Profilometer

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