Digital circularly polarized heterodyne ellipsometer

Chih Jen Yu; Jin Gor Chang; Chu En Lin; Cheng Chung Lee; Chien Chou

doi:10.1016/j.tsf.2009.10.139

Digital circularly polarized heterodyne ellipsometer

Chih Jen Yu, Jin Gor Chang, Chu En Lin, Cheng Chung Lee, Chien Chou^*

^*Corresponding author for this work

Graduate Institute of Electro-Optical Engineering

Research output: Contribution to journal › Journal Article › peer-review

1 Scopus citations

Abstract

In this research, a digital circularly polarized heterodyne ellipsometer (DCPHE) is developed, which has a heterodyne interferometer based on a dual-frequency paired circularly polarized laser beam integrated with a digital storage oscilloscope. DCPHE is an amplitude-sensitive ellipsometer that is applicable to real time and precise measurement of ellipsometric parameters. The systematic errors are likewise derived and analyzed. When the incident angle α are set at 60° and 70° in DCPHE, an accuracy of less than 0.7% of the ellipsometric parameter measurement of the SiO₂ thin film deposited on silicon substrate is achieved.

Original language	English
Pages (from-to)	3391-3395
Number of pages	5
Journal	Thin Solid Films
Volume	518
Issue number	12
DOIs	https://doi.org/10.1016/j.tsf.2009.10.139
State	Published - 02 04 2010

Keywords

Circular polarization
Dual-frequency laser
Ellipsometry
Interferometry
Optical heterodyne

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10.1016/j.tsf.2009.10.139

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title = "Digital circularly polarized heterodyne ellipsometer",

abstract = "In this research, a digital circularly polarized heterodyne ellipsometer (DCPHE) is developed, which has a heterodyne interferometer based on a dual-frequency paired circularly polarized laser beam integrated with a digital storage oscilloscope. DCPHE is an amplitude-sensitive ellipsometer that is applicable to real time and precise measurement of ellipsometric parameters. The systematic errors are likewise derived and analyzed. When the incident angle α are set at 60° and 70° in DCPHE, an accuracy of less than 0.7\% of the ellipsometric parameter measurement of the SiO2 thin film deposited on silicon substrate is achieved.",

keywords = "Circular polarization, Dual-frequency laser, Ellipsometry, Interferometry, Optical heterodyne",

author = "Yu, \{Chih Jen\} and Chang, \{Jin Gor\} and Lin, \{Chu En\} and Lee, \{Cheng Chung\} and Chien Chou",

year = "2010",

month = apr,

day = "2",

doi = "10.1016/j.tsf.2009.10.139",

language = "英语",

volume = "518",

pages = "3391--3395",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Digital circularly polarized heterodyne ellipsometer

AU - Yu, Chih Jen

AU - Chang, Jin Gor

AU - Lin, Chu En

AU - Lee, Cheng Chung

AU - Chou, Chien

PY - 2010/4/2

Y1 - 2010/4/2

N2 - In this research, a digital circularly polarized heterodyne ellipsometer (DCPHE) is developed, which has a heterodyne interferometer based on a dual-frequency paired circularly polarized laser beam integrated with a digital storage oscilloscope. DCPHE is an amplitude-sensitive ellipsometer that is applicable to real time and precise measurement of ellipsometric parameters. The systematic errors are likewise derived and analyzed. When the incident angle α are set at 60° and 70° in DCPHE, an accuracy of less than 0.7% of the ellipsometric parameter measurement of the SiO2 thin film deposited on silicon substrate is achieved.

AB - In this research, a digital circularly polarized heterodyne ellipsometer (DCPHE) is developed, which has a heterodyne interferometer based on a dual-frequency paired circularly polarized laser beam integrated with a digital storage oscilloscope. DCPHE is an amplitude-sensitive ellipsometer that is applicable to real time and precise measurement of ellipsometric parameters. The systematic errors are likewise derived and analyzed. When the incident angle α are set at 60° and 70° in DCPHE, an accuracy of less than 0.7% of the ellipsometric parameter measurement of the SiO2 thin film deposited on silicon substrate is achieved.

KW - Circular polarization

KW - Dual-frequency laser

KW - Ellipsometry

KW - Interferometry

KW - Optical heterodyne

UR - https://www.scopus.com/pages/publications/77649216369

U2 - 10.1016/j.tsf.2009.10.139

DO - 10.1016/j.tsf.2009.10.139

M3 - 文章

AN - SCOPUS:77649216369

SN - 0040-6090

VL - 518

SP - 3391

EP - 3395

JO - Thin Solid Films

JF - Thin Solid Films

IS - 12

ER -

Digital circularly polarized heterodyne ellipsometer

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Keywords

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