Distributed performance evaluation of a controlled IC fab

Chung Hsien Kuo; Han Pang Huang

doi:10.1109/TRA.2003.819720

Distributed performance evaluation of a controlled IC fab

Chung Hsien Kuo^*
, Han Pang Huang

^*Corresponding author for this work

National Taiwan University

Research output: Contribution to journal › Journal Article › peer-review

9 Scopus citations

Abstract

Integrated circuit (IC) foundry fabs are difficult to model due to the increasing product mixes and flexible routes. An imprecise fab model cannot be used to evaluate fab performance or estimate product cycle time. The distributed colored timed Petri net (DCTPN) is a type of high-level Petri net with embedded entity attribute, time, communication, and remote object invocation properties that contribute to realistic descriptions, distributed modeling, and manufacturing execution system integration. Furthermore, the resource-oriented DCTPN modeling extends product mix and flexible route modeling capabilities. The DCTPN conflict resolution and token competition rules are used to construct the dispatching system for a controlled IC fab. A simplified 200 mm IC fab with six functional areas is discussed and demonstrated based on different control policies.

Original language	English
Pages (from-to)	1027-1033
Number of pages	7
Journal	IEEE Transactions on Robotics and Automation
Volume	19
Issue number	6
DOIs	https://doi.org/10.1109/TRA.2003.819720
State	Published - 12 2003
Externally published	Yes

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Dispatching system
Distributed colored timed Petri net (DCTPN)
Integrated circuit (IC) foundry fab
Manufacturing execution system (MES)
Performance evaluation
Semiconductor manufacturing

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10.1109/TRA.2003.819720

Cite this

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title = "Distributed performance evaluation of a controlled IC fab",

abstract = "Integrated circuit (IC) foundry fabs are difficult to model due to the increasing product mixes and flexible routes. An imprecise fab model cannot be used to evaluate fab performance or estimate product cycle time. The distributed colored timed Petri net (DCTPN) is a type of high-level Petri net with embedded entity attribute, time, communication, and remote object invocation properties that contribute to realistic descriptions, distributed modeling, and manufacturing execution system integration. Furthermore, the resource-oriented DCTPN modeling extends product mix and flexible route modeling capabilities. The DCTPN conflict resolution and token competition rules are used to construct the dispatching system for a controlled IC fab. A simplified 200 mm IC fab with six functional areas is discussed and demonstrated based on different control policies.",

keywords = "Dispatching system, Distributed colored timed Petri net (DCTPN), Integrated circuit (IC) foundry fab, Manufacturing execution system (MES), Performance evaluation, Semiconductor manufacturing",

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year = "2003",

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doi = "10.1109/TRA.2003.819720",

language = "英语",

volume = "19",

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AB - Integrated circuit (IC) foundry fabs are difficult to model due to the increasing product mixes and flexible routes. An imprecise fab model cannot be used to evaluate fab performance or estimate product cycle time. The distributed colored timed Petri net (DCTPN) is a type of high-level Petri net with embedded entity attribute, time, communication, and remote object invocation properties that contribute to realistic descriptions, distributed modeling, and manufacturing execution system integration. Furthermore, the resource-oriented DCTPN modeling extends product mix and flexible route modeling capabilities. The DCTPN conflict resolution and token competition rules are used to construct the dispatching system for a controlled IC fab. A simplified 200 mm IC fab with six functional areas is discussed and demonstrated based on different control policies.

KW - Dispatching system

KW - Distributed colored timed Petri net (DCTPN)

KW - Integrated circuit (IC) foundry fab

KW - Manufacturing execution system (MES)

KW - Performance evaluation

KW - Semiconductor manufacturing

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M3 - 文章

AN - SCOPUS:0442295568

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JO - IEEE Transactions on Robotics and Automation

JF - IEEE Transactions on Robotics and Automation

IS - 6

ER -

Distributed performance evaluation of a controlled IC fab

Abstract

UN SDGs

Keywords

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