Dual-frequency heterodyne ellipsometer for characterizing generalized elliptically birefringent media

Chin Jen Yu*, Chu En Lin, Ying Chang Li, Li Dek Chou, Jheng Syong Wu, Cheng Chung Lee, Chien Chou

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

8 Scopus citations

Abstract

This research proposed a dual-frequency heterodyne ellipsometer (DHE) in which a dual-frequency collinearly polarized laser beam with equal amplitude and zero phase difference between p- and s-polarizations is setup. It is based on the polarizer-sample-analyzer, PSA configuration of the conventional ellipsometer. DHE enables to characterize a generalized elliptical phase retarder by treating it as the combination of a linear phase retarder and a polarization rotator. The method for measuring elliptical birefringence of an elliptical phase retarder based on the equivalence theorem of an unitary optical system was derived and the experimental verification by use of DHE was demonstrated too. The experimental results show the capability of DHE on characterization of a generalized phase retardation plate accurately.

Original languageEnglish
Pages (from-to)19213-19224
Number of pages12
JournalOptics Express
Volume17
Issue number21
DOIs
StatePublished - 12 10 2009

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