Dual-frequency paired polarization phase shifting ellipsometer

Chih Jen Yu, Chu En Lin, Hui Kang Teng, Chien Chung Tsai, Chien Chou*

*Corresponding author for this work

Research output: Contribution to journalJournal Article peer-review

7 Scopus citations

Abstract

A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis.

Original languageEnglish
Pages (from-to)1516-1520
Number of pages5
JournalOptics Communications
Volume282
Issue number8
DOIs
StatePublished - 15 04 2009

Keywords

  • Dual-frequency laser
  • Ellipsometry
  • Optical heterodyne interferometer
  • Phase shifting technique

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