Dual-frequency paired polarization phase shifting ellipsometer

Chih Jen Yu; Chu En Lin; Hui Kang Teng; Chien Chung Tsai; Chien Chou

doi:10.1016/j.optcom.2009.01.001

Dual-frequency paired polarization phase shifting ellipsometer

Chih Jen Yu
, Chu En Lin
, Hui Kang Teng
, Chien Chung Tsai
, Chien Chou^*

^*Corresponding author for this work

National Central University
Nan Kai University of Technology
National Taiwan University
National Yang Ming Chiao Tung University
Chang Gung University

Research output: Contribution to journal › Journal Article › peer-review

7 Scopus citations

Abstract

A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis.

Original language	English
Pages (from-to)	1516-1520
Number of pages	5
Journal	Optics Communications
Volume	282
Issue number	8
DOIs	https://doi.org/10.1016/j.optcom.2009.01.001
State	Published - 15 04 2009
Externally published	Yes

Keywords

Dual-frequency laser
Ellipsometry
Optical heterodyne interferometer
Phase shifting technique

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10.1016/j.optcom.2009.01.001

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@article{394fc76ed0f34a9c9e702e8a497b492f,

title = "Dual-frequency paired polarization phase shifting ellipsometer",

abstract = "A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis.",

keywords = "Dual-frequency laser, Ellipsometry, Optical heterodyne interferometer, Phase shifting technique",

author = "Yu, \{Chih Jen\} and Lin, \{Chu En\} and Teng, \{Hui Kang\} and Tsai, \{Chien Chung\} and Chien Chou",

year = "2009",

month = apr,

day = "15",

doi = "10.1016/j.optcom.2009.01.001",

language = "英语",

volume = "282",

pages = "1516--1520",

journal = "Optics Communications",

issn = "0030-4018",

publisher = "Elsevier B.V.",

number = "8",

}

TY - JOUR

T1 - Dual-frequency paired polarization phase shifting ellipsometer

AU - Yu, Chih Jen

AU - Lin, Chu En

AU - Teng, Hui Kang

AU - Tsai, Chien Chung

AU - Chou, Chien

PY - 2009/4/15

Y1 - 2009/4/15

N2 - A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis.

AB - A novel dual-frequency paired polarization phase shifting ellipsometer (DPPSE) is proposed and experimentally demonstrated. It combines the features of the phase shifting interferometer and common-path polarized heterodyne interferometric ellipsometer where the ellipsometric parameters (EP) of a specimen are measured accurately. The experimental results verify that DPPSE is capable of determining the full dynamic range of EP. In addition, the properties of dual-frequency paired linearly polarized laser beam in DPPSE perform in common phase noise rejection mode. It is insensitive to environmental disturbance and laser frequency noise. The capability of DPPSE to perform higher accuracy EP measurement than conventional ellipsometer is verified according to error analysis.

KW - Dual-frequency laser

KW - Ellipsometry

KW - Optical heterodyne interferometer

KW - Phase shifting technique

UR - https://www.scopus.com/pages/publications/60749129146

U2 - 10.1016/j.optcom.2009.01.001

DO - 10.1016/j.optcom.2009.01.001

M3 - 文章

AN - SCOPUS:60749129146

SN - 0030-4018

VL - 282

SP - 1516

EP - 1520

JO - Optics Communications

JF - Optics Communications

IS - 8

ER -

Dual-frequency paired polarization phase shifting ellipsometer

Abstract

Keywords

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