Effect of Oxygen Plasma Treatment on the Electrical Characteristics of HfO2 Capacitors

藍森耀

Research output: Types of ThesisMaster's thesis

Translated title of the contribution氧電漿處理對二氧化鉿電容電性之影響
Original languageAmerican English
Supervisors/Advisors
  • Liu, Kou-Chen, Supervisor
StatePublished - 2012
Externally publishedYes

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