Effect of titanium content on the impedance characteristics of high-Κ TbTxOy electrolyte-insulator-semiconductor pH sensors

Chih Wei Wang*, Tung Ming Pan, Fu Chien Chiu, Lifeng Chi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The effect of titanium content on the impedance characteristics of TbTixOy EIS sensors was investigated by means of C-V method. The bulk resistance increases with increasing pH value of a solution. Finally, the TbTixOy EIS device measured at the inversion regime exhibited higher impedance as compared to the accumulation and depletion regimes.

Original languageEnglish
Title of host publication2014 10th International Vacuum Electron Sources Conference, IVESC 2014 and 2nd International Conference on Emission Electronics, ICEE 2014 - Proceedings
EditorsNikolay V. Egorov
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479957729
DOIs
StatePublished - 2014
Event2014 10th International Vacuum Electron Sources Conference, IVESC 2014 and 2nd International Conference on Emission Electronics, ICEE 2014 - Saint-Petersburg, Russian Federation
Duration: 30 06 201404 07 2014

Publication series

Name2014 10th International Vacuum Electron Sources Conference, IVESC 2014 and 2nd International Conference on Emission Electronics, ICEE 2014 - Proceedings

Conference

Conference2014 10th International Vacuum Electron Sources Conference, IVESC 2014 and 2nd International Conference on Emission Electronics, ICEE 2014
Country/TerritoryRussian Federation
CitySaint-Petersburg
Period30/06/1404/07/14

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

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