Effects of Ammonia Plasma Treatment and Post Plasma Annealing on Gd2O3 Nanocrystal Memory

Chih-Ting Lin, Jer-Chyi Wang, Chao-Sung Lai, Yong-Jin Joung, Kuan-Ting Chen

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2010
Event	International Electron Device and Materials Symposium (IEDMS 2010) - Taoyuan, Taiwan Duration: 18 11 2010 → 19 11 2010

Conference	International Electron Device and Materials Symposium (IEDMS 2010)
Period	18/11/10 → 19/11/10

Cite this

@conference{fdd243e5fb5140c9b2cd9573b166d701,

title = "Effects of Ammonia Plasma Treatment and Post Plasma Annealing on Gd2O3 Nanocrystal Memory",

author = "Chih-Ting Lin and Jer-Chyi Wang and Chao-Sung Lai and Yong-Jin Joung and Kuan-Ting Chen",

year = "2010",

language = "American English",

note = "International Electron Device and Materials Symposium (IEDMS 2010) ; Conference date: 18-11-2010 Through 19-11-2010",

}