| Translated title of the contribution | 共同佈植碳對磷去活化的影響 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
|
| State | Published - 2015 |
| Externally published | Yes |
Effects of Carbon Coimplantation on Phosphorus Deactivation in Silicon
戴志銘
Research output: Types of Thesis › Master's thesis