Effects of CF4 plasma treatment on the electrical characteristics of poly-silicon TFTs using a Tb2O3 gate dielectric
- Tung Ming Pan*
- , Zhi Hong Li
- , Chih Kang Deng
*Corresponding author for this work
- Chang Gung University
- National Yang Ming Chiao Tung University
Research output: Contribution to journal › Journal Article › peer-review
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