Abstract
Hot-embossing (thermal-compression) based microchannel fabrication techniques have gained much attention recently due to their low-cost setup and ease of implementation. However, not much effects have been attempted in trying to understand or characterize the mechanics of the hot-embossing process in fabricating microchannels. Most research groups still rely on trial-and-error processes to hot-emboss microchannels for microfluidic control applications. The present paper describes the application of the contact-stress analysis to understand the mechanism of using molds with micro-features to hot-emboss PMMA substrates. Experimental results showing that the resulting microchannel wall profile can be predicted with good accuracy via a close-form solution of the analysis are also presented.
Original language | English |
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Pages (from-to) | 353-357 |
Number of pages | 5 |
Journal | Microsystem Technologies |
Volume | 11 |
Issue number | 4-5 |
DOIs | |
State | Published - 04 2005 |
Externally published | Yes |
Keywords
- Micro hot-embossing
- Microchannel
- Microfluidics