Abstract
Residual stress, microstrain and grain size of ion plated Cr films deposited on molybdenum substrates were analyzed and studied. A model based on the effects of incident particle energy and/or momentum on the properties of these films is proposed and discussed. It was concluded that the film properties may be affected by both the momentum and energy transfer of the incident particles, or by either one.
| Original language | English |
|---|---|
| Pages (from-to) | 103-106 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 424 |
| Issue number | 1 |
| DOIs | |
| State | Published - 22 01 2003 |
| Externally published | Yes |
| Event | proceedings of the 1st Ineternational Conference on Materials - Singapore, Singapore Duration: 01 07 2001 → 06 07 2001 |
Keywords
- Cr thin films
- Energetic particle bombardment
- Ion plating