Effects of fluorination of carbon film and annealing conditions on side leakage current and current breakdown time of SiO2/graphene/Cu/Ti/SiO2/Si specimens

Chang Shuo Chang, Han Che Cheng, Chang Fu Han, Chao Sung Lai, Jen Fin Lin*

*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

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