@inproceedings{7c345e3a8c8b48dcb84618b772e62faf,
title = "Effects of growth parameters on surface-morphological, structural, electrical and optical properties of AZO Films by RF magnetron sputtering",
abstract = "500 nm-thick aluminum-doped zinc oxide (ZnO.Al) thin film is usually used as a front transparent conductive oxide (TCO) contact on photovoltaic devices, and for this application is often deposited by a reactive radio-frequency (r.f.) magnetron sputtering system from a ceramic target. This work reports on the preparation and characterization of AZO thin films on Corning 1737 glass substrates grown by reactive r.f.-magnetron sputtering from a ZnO ceramic target with 2 wt% A1 content. It was found that the growth parameters, such as chamber pressure, working power, and deposition temperature, have significant influences on the properties of AZO films. According to the experimental results: (1) Films were polycrystalline showing a strong preferred c-axis orientation. (2) With increasing working power, the resistivity decreased, and mobility and the carrier concentration increased. (3) Lower deposition temperature leads to a decrease in resistivity, with 2.5 × 10-4 Ω-cm representing the lowest resistivity reached.",
author = "Kuo, {Shou Yi} and Lin, {Wei Ting} and Chang, {Liann Be} and Jeng, {Ming Jer} and Lu, {Yong Tian} and Hu, {Sung Cheng}",
year = "2010",
language = "英语",
isbn = "9781605111742",
series = "Materials Research Society Symposium Proceedings",
pages = "141--146",
booktitle = "Zinc Oxide and Related Materials - 2009",
note = "2009 MRS Fall Meeting ; Conference date: 30-11-2009 Through 04-12-2009",
}