Effects of growth parameters on surface-morphological,structural,electrical and strain properties of molybdenum film by RF magnetron sputtering.

Shou-Yi Kuo; Liann-Be Chang

Effects of growth parameters on surface-morphological,structural,electrical and strain properties of molybdenum film by RF magnetron sputtering.

Shou-Yi Kuo
, Liann-Be Chang

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2008
Event	2008 International Electron Devices and Materials Symposia (IEDMS 2008) - Taichung,Taiwan Duration: 28 11 2008 → 29 11 2008

Conference

Conference	2008 International Electron Devices and Materials Symposia (IEDMS 2008)
Period	28/11/08 → 29/11/08

Cite this

@conference{fc424e8eb77b4eb98c4f4ebc2adfaed9,

title = "Effects of growth parameters on surface-morphological,structural,electrical and strain properties of molybdenum film by RF magnetron sputtering.",

author = "Shou-Yi Kuo and Liann-Be Chang",

year = "2008",

language = "American English",

note = "2008 International Electron Devices and Materials Symposia (IEDMS 2008) ; Conference date: 28-11-2008 Through 29-11-2008",

}