Effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO2 gate dielectrics on partially strain-compensated SiGeC/Si heterolayers

R. Mahapatra; S. Maikap; Je Hun Lee; G. S. Kar; A. Dhar; Nong M. Hwang; Doh Y. Kim; B. K. Mathur; S. K. Ray

doi:10.1063/1.1583143

Effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO₂ gate dielectrics on partially strain-compensated SiGeC/Si heterolayers

R. Mahapatra, S. Maikap, Je Hun Lee, G. S. Kar, A. Dhar, Nong M. Hwang, Doh Y. Kim, B. K. Mathur, S. K. Ray^*

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

7 Scopus citations

Abstract

The effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO₂ gate dielectrics on partially strain-compensated SiGeC/Si heterolayers were investigated. Secondary ion mass spectroscopy and x-ray photoelectron spectroscopy were used for the analysis. The N-treated film had a higher accumulation capacitance, lower leakage current density and higher breakdown field.

Original language	English
Pages (from-to)	4331-4333
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	24
DOIs	https://doi.org/10.1063/1.1583143
State	Published - 16 06 2003
Externally published	Yes

Access to Document

10.1063/1.1583143

Cite this

@article{e8213530c44644d0a26db2304d7d86aa,

title = "Effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO2 gate dielectrics on partially strain-compensated SiGeC/Si heterolayers",

abstract = "The effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO2 gate dielectrics on partially strain-compensated SiGeC/Si heterolayers were investigated. Secondary ion mass spectroscopy and x-ray photoelectron spectroscopy were used for the analysis. The N-treated film had a higher accumulation capacitance, lower leakage current density and higher breakdown field.",

author = "R. Mahapatra and S. Maikap and Lee, {Je Hun} and Kar, {G. S.} and A. Dhar and Hwang, {Nong M.} and Kim, {Doh Y.} and Mathur, {B. K.} and Ray, {S. K.}",

year = "2003",

month = jun,

day = "16",

doi = "10.1063/1.1583143",

language = "英语",

volume = "82",

pages = "4331--4333",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "24",

}

TY - JOUR

T1 - Effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO2 gate dielectrics on partially strain-compensated SiGeC/Si heterolayers

AU - Mahapatra, R.

AU - Maikap, S.

AU - Lee, Je Hun

AU - Kar, G. S.

AU - Dhar, A.

AU - Hwang, Nong M.

AU - Kim, Doh Y.

AU - Mathur, B. K.

AU - Ray, S. K.

PY - 2003/6/16

Y1 - 2003/6/16

N2 - The effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO2 gate dielectrics on partially strain-compensated SiGeC/Si heterolayers were investigated. Secondary ion mass spectroscopy and x-ray photoelectron spectroscopy were used for the analysis. The N-treated film had a higher accumulation capacitance, lower leakage current density and higher breakdown field.

AB - The effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO2 gate dielectrics on partially strain-compensated SiGeC/Si heterolayers were investigated. Secondary ion mass spectroscopy and x-ray photoelectron spectroscopy were used for the analysis. The N-treated film had a higher accumulation capacitance, lower leakage current density and higher breakdown field.

UR - http://www.scopus.com/inward/record.url?scp=0038450094&partnerID=8YFLogxK

U2 - 10.1063/1.1583143

DO - 10.1063/1.1583143

M3 - 文章

AN - SCOPUS:0038450094

SN - 0003-6951

VL - 82

SP - 4331

EP - 4333

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 24

ER -

Effects of interfacial nitrogen on the structural and electrical properties of ultrathin ZrO₂ gate dielectrics on partially strain-compensated SiGeC/Si heterolayers

Abstract

Access to Document

Other files and links

Fingerprint

Cite this