Effects of nh3 plasma and mg doping on ingazno ph sensing membrane

Chyuan Haur Kao; Chia Shao Liu; Shih Ming Chan; Chih Chen Kuo; Shang Che Tsai; Ming Ling Lee; Hsiang Chen

doi:10.3390/membranes11120994

Effects of nh₃ plasma and mg doping on ingazno ph sensing membrane

Chyuan Haur Kao
, Chia Shao Liu
, Shih Ming Chan
, Chih Chen Kuo
, Shang Che Tsai
, Ming Ling Lee^*
, Hsiang Chen^*

^*Corresponding author for this work

Department of Electronic Engineering

Research output: Contribution to journal › Journal Article › peer-review

3 Scopus citations

Abstract

In this study, the effects of magnesium (Mg) doping and Ammonia (NH₃ ) plasma on the pH sensing capabilities of InGaZnO membranes were investigated. Undoped InGaZnO and Mg-doped pH sensing membranes with NH₃ plasma were examined with multiple material analyses including X-ray diffraction, X-ray photoelectron spectroscopy, secondary ion mass spectroscopy and transmission electron microscope, and pH sensing behaviors of the membrane in electrolyte-insulatorsemiconductors. Results indicate that Mg doping and NH₃ plasma treatment could superpositionally enhance crystallization in fine nanostructures, and strengthen chemical bindings. Results indicate these material improvements increased pH sensing capability significantly. Plasma-treated Mg-doped InGaZnO pH sensing membranes show promise for future pH sensing biosensors.

Original language	English
Article number	994
Journal	Membranes
Volume	11
Issue number	12
DOIs	https://doi.org/10.3390/membranes11120994
State	Published - 12 2021

Bibliographical note

Publisher Copyright:
© 2021 by the authors. Licensee MDPI, Basel, Switzerland.

Keywords

Ammonia plasma treatment
Biosensors
Indium gallium zinc oxide
Magnesium doped
Membranes
PH sensing
Sputtering

Access to Document

10.3390/membranes11120994

Cite this

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title = "Effects of nh3 plasma and mg doping on ingazno ph sensing membrane",

abstract = "In this study, the effects of magnesium (Mg) doping and Ammonia (NH3 ) plasma on the pH sensing capabilities of InGaZnO membranes were investigated. Undoped InGaZnO and Mg-doped pH sensing membranes with NH3 plasma were examined with multiple material analyses including X-ray diffraction, X-ray photoelectron spectroscopy, secondary ion mass spectroscopy and transmission electron microscope, and pH sensing behaviors of the membrane in electrolyte-insulatorsemiconductors. Results indicate that Mg doping and NH3 plasma treatment could superpositionally enhance crystallization in fine nanostructures, and strengthen chemical bindings. Results indicate these material improvements increased pH sensing capability significantly. Plasma-treated Mg-doped InGaZnO pH sensing membranes show promise for future pH sensing biosensors.",

keywords = "Ammonia plasma treatment, Biosensors, Indium gallium zinc oxide, Magnesium doped, Membranes, PH sensing, Sputtering",

author = "Kao, \{Chyuan Haur\} and Liu, \{Chia Shao\} and Chan, \{Shih Ming\} and Kuo, \{Chih Chen\} and Tsai, \{Shang Che\} and Lee, \{Ming Ling\} and Hsiang Chen",

note = "Publisher Copyright: {\textcopyright} 2021 by the authors. Licensee MDPI, Basel, Switzerland.",

year = "2021",

month = dec,

doi = "10.3390/membranes11120994",

language = "英语",

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T1 - Effects of nh3 plasma and mg doping on ingazno ph sensing membrane

AU - Kao, Chyuan Haur

AU - Liu, Chia Shao

AU - Chan, Shih Ming

AU - Kuo, Chih Chen

AU - Tsai, Shang Che

AU - Lee, Ming Ling

AU - Chen, Hsiang

PY - 2021/12

Y1 - 2021/12

N2 - In this study, the effects of magnesium (Mg) doping and Ammonia (NH3 ) plasma on the pH sensing capabilities of InGaZnO membranes were investigated. Undoped InGaZnO and Mg-doped pH sensing membranes with NH3 plasma were examined with multiple material analyses including X-ray diffraction, X-ray photoelectron spectroscopy, secondary ion mass spectroscopy and transmission electron microscope, and pH sensing behaviors of the membrane in electrolyte-insulatorsemiconductors. Results indicate that Mg doping and NH3 plasma treatment could superpositionally enhance crystallization in fine nanostructures, and strengthen chemical bindings. Results indicate these material improvements increased pH sensing capability significantly. Plasma-treated Mg-doped InGaZnO pH sensing membranes show promise for future pH sensing biosensors.

AB - In this study, the effects of magnesium (Mg) doping and Ammonia (NH3 ) plasma on the pH sensing capabilities of InGaZnO membranes were investigated. Undoped InGaZnO and Mg-doped pH sensing membranes with NH3 plasma were examined with multiple material analyses including X-ray diffraction, X-ray photoelectron spectroscopy, secondary ion mass spectroscopy and transmission electron microscope, and pH sensing behaviors of the membrane in electrolyte-insulatorsemiconductors. Results indicate that Mg doping and NH3 plasma treatment could superpositionally enhance crystallization in fine nanostructures, and strengthen chemical bindings. Results indicate these material improvements increased pH sensing capability significantly. Plasma-treated Mg-doped InGaZnO pH sensing membranes show promise for future pH sensing biosensors.

KW - Ammonia plasma treatment

KW - Biosensors

KW - Indium gallium zinc oxide

KW - Magnesium doped

KW - Membranes

KW - PH sensing

KW - Sputtering

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