Abstract
Piezoelectric lead zirconium titanate (PZT) thick films and PZT surface acoustic wave (SAW) filters were prepared by micro-powder-sol-gel process. The properties of the PZT thick films as well as the characteristics of the PZT SAW filters were found to be greatly affected by the conditions of the sol-gel preparation process. The SAW filter produced by using the PZT thick films prepared from the 0.1 M precursor slurry solution with dispersant Nopcosperse were found to have the best performance with the filtered center frequency 635.45 Hz and insertion loss 14.41 dB, respectively. In addition, it was also found that location of the filtered center frequency and the width of the filtered band of the PZT SAW filters were closely related to the properties of the PZT thick films.
| Original language | English |
|---|---|
| Journal | International SAMPE Symposium and Exhibition (Proceedings) |
| Volume | 51 |
| State | Published - 2006 |
| Event | SAMPE '06: Creating New Opportunities For The World Economy - Long Beach, CA, United States Duration: 30 04 2006 → 04 05 2006 |
Keywords
- Coatings/films materials
- Materials-piezoelectric
- Sol-gel processing