Effects of tungsten to boron ratios on the microstructure and mechanical properties of WxBy thin films

Research output: Contribution to conference › Proceeding

Original language	American English
State	Published - 2024
Event	The 17th International Symposium on Sputtering & Plasma Processes (ISSP2024) - Kyoto, Japan Duration: 02 07 2024 → 05 07 2024

Conference	The 17th International Symposium on Sputtering & Plasma Processes (ISSP2024)
Period	02/07/24 → 05/07/24

Cite this

@conference{1d7fb879a65e4da4a840595d78964310,

title = "Effects of tungsten to boron ratios on the microstructure and mechanical properties of WxBy thin films",

author = "Bih-Show Lou and Jun-Xing Wang and Jyh-Wei Lee",

year = "2024",

language = "American English",

note = "The 17th International Symposium on Sputtering \& Plasma Processes (ISSP2024) ; Conference date: 02-07-2024 Through 05-07-2024",

}