Electrical characteristics study for RTP treatment on capacitor with Al2O3 dielectrics

陳怡榮

Research output: Types of ThesisMaster's thesis

Translated title of the contribution快速熱加溫製程於A2O3電容之電性探討
Original languageAmerican English
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
StatePublished - 2005
Externally publishedYes

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