| Translated title of the contribution | 快速熱加溫製程於A2O3電容之電性探討 |
|---|---|
| Original language | American English |
| Supervisors/Advisors |
|
| State | Published - 2005 |
| Externally published | Yes |
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Electrical characteristics study for RTP treatment on capacitor with Al2O3 dielectrics
- 陳怡榮
Research output: Types of Thesis › Master's thesis