@inproceedings{12346bb0253246aca48c2032754a4afc,
title = "Electrical characterization of AIN/Si(111) interface",
abstract = "This work investigates the interface of AlN/Si(111) by Hall and thermal electrical measurement. The results show that a p-type conducting layer was unintentionally formed at the interface.",
author = "Tseng, \{C. Y.\} and Lien, \{W. C.\} and Wang, \{Y. N.\} and Chen, \{N. C.\}",
year = "2007",
doi = "10.1109/CLEOPR.2007.4391715",
language = "英语",
isbn = "1424411734",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
booktitle = "2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM",
note = "2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM ; Conference date: 26-08-2007 Through 31-08-2007",
}